WSS8000
Wafer Sorting System
Designed to transfer wafer from the input cassette to output cassette with two standard load ports that is able to fit 8" SEMI standard open cassette, 12" FOUP cassette and 12" FOSB cassette.
Key Features :
Capability to handle 200mm & 300mm wafers
Wafer transfer with 5 sorting methods
Wafer pre-aligner for orientation check & wafer alignment and programmable wafer ID reader IOSS WID120 OCR reader
Communication between the Host and equipment
High-accuracy wafer Aligner for both flat and notch wafers
(SECS/GEM) compatibility customized software for wafer maps
Upload/Download and easily retrievable from the server
Description
Designed to transfer wafers from the input cassette to the output cassette. The machine is designed with two standard load ports that are able to fit 8" SEMI standard open cassette, 12" FOUP cassette, and 12" FOSB cassette. The mapping sensor in the system is able to detect any wafer presence, absence, cross slot, or double wafer inside the cassette. A robotic arm is integrated with the end effector which is using Bernoulli or Vacuum suction types to transfer the wafer to the output cassette depending on the wafer features). The WSS8000 is capable of performing wafer transfer with 5 sorting methods, such as Wafer ID sorting, sequential sorting, drag & drop sorting, sub-lot wafer sorting, and slot-to-slot sorting.
